China's largest chipmaker testing first homegrown immersion DUV litho tool — SMIC takes significant step on road to wafer fab equipment self-sufficiency

Date: 2025-09-17 16:11:15

SMIC is testing a domestically built immersion DUV lithography system developed by Yuliangsheng and capable of 28nm-class process technology. But while it is said that the tool could be used to make 7nm or even 5nm-class chips with multipatterning, it remains to be seen whether this is going to happen any time soon.